¹â¿Ì»úºÍ¿ÌÊ´»ú¶¼ÊÇоƬÉú²ú¹ý³ÌÖÐ×î¹Ø¼üµÄ»·½Ú¡£
ÆäʵÈç¹û°ÑоƬ·Å´óÒ»µã¿´£¬¾ÍÊÇ´óÒ»µãµÄ¼¯³Éµç·¡£
¼¯³Éµç·Éú²ú×î¹Ø¼üµÄÁ½²¿¾ÍÊÇÓ¡Ë¢ºÍµñ¿Ì¡£
ÄÇô¼¯³Éµç·ÊÇÔõôÉú²úµÄÄØ£¿
Óø²Í°å£¨´ó²¿·ÖÊÇpcb¸²Í°å£©ÓÃÓ¡Ë¢»úÔÚ¸²Í°åÉÏÓ¡Ë¢³öµç·ͼ£¬È»ºóÓõñ¿Ì»ú°´ÕÕÓ¡Ë¢ºÃµÄµç·ͼ½øÐеñ¿Ì£¬×îºóÔÙº¸½ÓÏà¹ØµÄµç×ÓÔª¼þ¡£
ͬÑù£¬Ð¾Æ¬Ò²ÊÇÈç´Ë¡£
¹â¿Ì»úµÄ×÷ÓþÍÀàËÆÓÚÓ¡Ë¢»ú¡£
Ö»ÊÇоƬµÄÌå»ý̫С£¬ÐèÒªÌØÊâµÄÓ¡Ë¢¡£
¾ßÌå×ö·¨ÊÇ£¬½«Ò»²ã¹â¿Ì½º¸²¸ÇÔÚ½ðÊôÉÏ£¨Ò»°ã¶¼Êǹ辧Ì壩ȻºóÓùⰴÕÕÒ»¶¨µÄµç·ͼÏȰѹâ¿Ì½ºÇÖÊ´µô¡£
¹âÄܹ»¸¯Ê´¹â¿Ì½º£¬µ«ÊDz»Äܹ»¸¯Ê´½ðÊô£¬ËùÒÔÔÚÔ²¾§£¨¹è¾§Ì壩ÉϾ͸²¸ÇÒ»²ã¡°µç·ͼ¡±¡£
ÄÇôÔõô²ÅÄܹ»½«µç·ͼŪµ½¹â¿Ì½ºÉÏÄØ£¿
µç·µÄÐÎ×´Ò»¿ªÊ¼ÊÇ»ÔÚÒ»ÕűȽϴóµÄ·Ö»®°åÉϵģ¬È»ºóͨ¹ý͸¾µ°Ñµç·µÄͼ°¸ËõµÄºÜС£¬È»ºóÕÕÉäÔÚͿĨÁ˹â¿Ì½ºµÄ½ðÊô°åÉÏ£¨¾ÍÊÇËùνµÄ¾§Ô²ÁË£©¡£
Õâ¸ö¹ý³ÌʹÓõĻúÆ÷¾ÍÊǹâ¿Ì»ú¡£
ÒÇÆ÷µÄ¸´Ôӳ̶ÈÔ¶³¬ÈËÃǵÄÏ൱£¬ÏÖÔÚÊÀ½çÉÏ×îÏȽøµÄ¹â¿Ì»úÖÆÔìÉÌÊǺÉÀ¼µÄasml£¨°¢Ë¹Âó¶û£¬advaormateriallithography£©£¬¿ÉÒÔ˵ȫÊÀ½ç¾ÍÖ»ÓÐÕâÒ»¼Ò±È½Ï³ÉÊìµÄ¹â¿Ì»ú¹«Ë¾¡£
ÒòΪasmlÕ¼ÓÐÁËÈ«Çò80%ÒÔÉϵÄÊг¡·Ý¶î¡£
ʣϵÄÊг¡·Ý¶î£¬»ù±¾ÉÏÊôÓÚ¶«Ñ󣬶«ÑóµÄÄ῵ºÍ¼ÑÄܿɲ»Êǵ¥´¿µÄÕÕÏà»ú¹«Ë¾£¬¶øÊÇÓÐÏ൱ţêþ